Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques

P. Bruno; G. Cicala; A. M. Losacco; P. Decuzzi

doi:10.1016/j.surfcoat.2003.10.035

Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques

P. Bruno, G. Cicala, A. M. Losacco, P. Decuzzi

Academic Institute

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

The good combination of chemical and physical properties of hydrogenated amorphous carbon (a-C:H) coatings makes them suitable for tribological, biomedical and microelectronic applications. In this work, nano-indentation and nano-scratching tests have been used to determine the mechanical properties of a-C:H films produced via plasma chemical vapour deposition from CH₄-Ar gas mixtures. A capacitive ion-etching reactor has been used for film deposition with a bias and a mixture composition ranging between 0 V and -400 V and 21.4% and 100%, respectively. The variation of Young's modulus (E) and hardness (H) through film thickness has been assessed by continuous multi-cycle indentations, and sub-surface maxima of approximately 150 GPa and 20 GPa have been measured, respectively. A maximum critical load (L_c) for film delamination of approximately 170 mN has been estimated by nano-scratching. A discussion on bias voltage and mixture composition effect on E, H and L_c is presented.

Original language	English (US)
Pages (from-to)	259-264
Number of pages	6
Journal	Surface and Coatings Technology
Volume	180-181
DOIs	https://doi.org/10.1016/j.surfcoat.2003.10.035
State	Published - Mar 1 2004

Keywords

A-C:H films
Mechanical properties
Nano-indentation
Nano-scratching
PECVD

ASJC Scopus subject areas

Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

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10.1016/j.surfcoat.2003.10.035

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title = "Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques",

abstract = "The good combination of chemical and physical properties of hydrogenated amorphous carbon (a-C:H) coatings makes them suitable for tribological, biomedical and microelectronic applications. In this work, nano-indentation and nano-scratching tests have been used to determine the mechanical properties of a-C:H films produced via plasma chemical vapour deposition from CH4-Ar gas mixtures. A capacitive ion-etching reactor has been used for film deposition with a bias and a mixture composition ranging between 0 V and -400 V and 21.4% and 100%, respectively. The variation of Young's modulus (E) and hardness (H) through film thickness has been assessed by continuous multi-cycle indentations, and sub-surface maxima of approximately 150 GPa and 20 GPa have been measured, respectively. A maximum critical load (Lc) for film delamination of approximately 170 mN has been estimated by nano-scratching. A discussion on bias voltage and mixture composition effect on E, H and Lc is presented.",

keywords = "A-C:H films, Mechanical properties, Nano-indentation, Nano-scratching, PECVD",

author = "P. Bruno and G. Cicala and Losacco, {A. M.} and P. Decuzzi",

note = "Funding Information: The authors wish to express their sincere gratitude to Gregory Favaro of CSM Instruments SA—Switzerland for his invaluable help and assistance with the experiments. Dr Paolo Decuzzi acknowledges the financial support of the Center of Excellence for Computational Mechanics at the Politecnico of Bari. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.",

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doi = "10.1016/j.surfcoat.2003.10.035",

language = "English (US)",

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AU - Bruno, P.

AU - Cicala, G.

AU - Losacco, A. M.

AU - Decuzzi, P.

N1 - Funding Information: The authors wish to express their sincere gratitude to Gregory Favaro of CSM Instruments SA—Switzerland for his invaluable help and assistance with the experiments. Dr Paolo Decuzzi acknowledges the financial support of the Center of Excellence for Computational Mechanics at the Politecnico of Bari. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.

PY - 2004/3/1

Y1 - 2004/3/1

N2 - The good combination of chemical and physical properties of hydrogenated amorphous carbon (a-C:H) coatings makes them suitable for tribological, biomedical and microelectronic applications. In this work, nano-indentation and nano-scratching tests have been used to determine the mechanical properties of a-C:H films produced via plasma chemical vapour deposition from CH4-Ar gas mixtures. A capacitive ion-etching reactor has been used for film deposition with a bias and a mixture composition ranging between 0 V and -400 V and 21.4% and 100%, respectively. The variation of Young's modulus (E) and hardness (H) through film thickness has been assessed by continuous multi-cycle indentations, and sub-surface maxima of approximately 150 GPa and 20 GPa have been measured, respectively. A maximum critical load (Lc) for film delamination of approximately 170 mN has been estimated by nano-scratching. A discussion on bias voltage and mixture composition effect on E, H and Lc is presented.

AB - The good combination of chemical and physical properties of hydrogenated amorphous carbon (a-C:H) coatings makes them suitable for tribological, biomedical and microelectronic applications. In this work, nano-indentation and nano-scratching tests have been used to determine the mechanical properties of a-C:H films produced via plasma chemical vapour deposition from CH4-Ar gas mixtures. A capacitive ion-etching reactor has been used for film deposition with a bias and a mixture composition ranging between 0 V and -400 V and 21.4% and 100%, respectively. The variation of Young's modulus (E) and hardness (H) through film thickness has been assessed by continuous multi-cycle indentations, and sub-surface maxima of approximately 150 GPa and 20 GPa have been measured, respectively. A maximum critical load (Lc) for film delamination of approximately 170 mN has been estimated by nano-scratching. A discussion on bias voltage and mixture composition effect on E, H and Lc is presented.

KW - A-C:H films

KW - Mechanical properties

KW - Nano-indentation

KW - Nano-scratching

KW - PECVD

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Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques

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Keywords

ASJC Scopus subject areas

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