TY - JOUR
T1 - A micromechanical flow sensor for microfluidic applications
AU - Czaplewski, David A.
AU - Ilic, Bojan Rob
AU - Zalalutdinov, Maxim
AU - Olbricht, William L.
AU - Zehnder, Alan T.
AU - Craighead, Harold G.
AU - Michalske, Terry A.
N1 - Funding Information:
Manuscript received September 10, 2003; revised January 12, 2004. This work was supported by the NSF, through the Nanobiotechnology Center and the Cornell Center for Materials Research, Sandia National Labs, and the Department of Education. Subject Editor G. Stemme. D. A. Czaplewski is with the Nanostructure and Semiconductor Physics Department, Sandia National Laboratories, Albuquerque, NM 87185-1415, USA. He is also with the Building 897 Room 3454, 1515 Eubank S.E., Albuquerque, NM 87123 USA (e-mail: daczapl@sandia.gov). B. R. Ilic is with the Department of Applied Physics, Cornell University, Ithaca, NY 14853 USA. M. Zalalutdinov is with the Physics Department, Cornell University, Ithaca, NY 14853 USA. W. L. Olbricht is with the Department of Chemical Engineering, Cornell University, Ithaca, NY 14853 USA. A. T. Zehnder is with the Department of Theoretical and Applied Mechanics, Cornell University, Ithaca, NY 14853 USA. H. G. Craighead is with the Department of Applied Physics, Cornell University, Ithaca, NY 14853 USA. T. A. Michalske is with the Biomolecular Materials and Interfaces Group, Sandia National Lab, Albuquerque, NM 87185 USA. Digital Object Identifier 10.1109/JMEMS.2004.832179
PY - 2004/8
Y1 - 2004/8
N2 - We fabricated a microfluidic flow meter and measured its response to fluid flow in a microfluidic channel. The flow meter consisted of a micromechanical plate, coupled to a laser deflection system to measure the deflection of the plate during fluid flow. The 100 μm square plate was clamped on three sides and elevated 3 μm above the bottom surface of the channel. The response of the flow meter was measured for flow rates, ranging from 2.1 to 41.7 μL/min. Several fluids, with dynamic viscosities ranging from 0.8 to 4.5 × 10-3 N/m, were flowed through the channels. Flow was established in the microfluidic channel by means of a syringe pump, and the angular deflection of the plate monitored. The response of the plate to flow of a fluid with a viscosity of 4.5 × 10-3 N/m was linear for all flow rates, while the plate responded linearly to flow rates less than 4.2 μL/min of solutions with lower dynamic viscosities. The sensitivity of the deflection of the plate to fluid flow was 12.5 ± 0.2 μrad/(μL/min), for a fluid with a viscosity of 4.5 × 10-3 N/m. The encapsulated plate provided local flow information along the length of a microfluidic channel.
AB - We fabricated a microfluidic flow meter and measured its response to fluid flow in a microfluidic channel. The flow meter consisted of a micromechanical plate, coupled to a laser deflection system to measure the deflection of the plate during fluid flow. The 100 μm square plate was clamped on three sides and elevated 3 μm above the bottom surface of the channel. The response of the flow meter was measured for flow rates, ranging from 2.1 to 41.7 μL/min. Several fluids, with dynamic viscosities ranging from 0.8 to 4.5 × 10-3 N/m, were flowed through the channels. Flow was established in the microfluidic channel by means of a syringe pump, and the angular deflection of the plate monitored. The response of the plate to flow of a fluid with a viscosity of 4.5 × 10-3 N/m was linear for all flow rates, while the plate responded linearly to flow rates less than 4.2 μL/min of solutions with lower dynamic viscosities. The sensitivity of the deflection of the plate to fluid flow was 12.5 ± 0.2 μrad/(μL/min), for a fluid with a viscosity of 4.5 × 10-3 N/m. The encapsulated plate provided local flow information along the length of a microfluidic channel.
UR - http://www.scopus.com/inward/record.url?scp=4344559691&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=4344559691&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2004.832179
DO - 10.1109/JMEMS.2004.832179
M3 - Article
AN - SCOPUS:4344559691
SN - 1057-7157
VL - 13
SP - 576
EP - 585
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 4
ER -