CONTACT LITHOGRAPHY AT 157 NM WITH AN F//2 EXCIMER LASER.

Harold G. Craighead, J. C. White, R. E. Horward, L. D. Jackel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Unknown Host Publication Title
Place of Publication	New York, NY, USA
Publisher	Institute of Electrical and Electronics Engineers Inc.
State	Published - Dec 1 1983

ASJC Scopus subject areas

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title = "CONTACT LITHOGRAPHY AT 157 NM WITH AN F//2 EXCIMER LASER.",

author = "Craighead, {Harold G.} and White, {J. C.} and Horward, {R. E.} and Jackel, {L. D.}",

year = "1983",

month = dec,

day = "1",

language = "English",

booktitle = "Unknown Host Publication Title",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

address = "United States",

}

TY - GEN

T1 - CONTACT LITHOGRAPHY AT 157 NM WITH AN F//2 EXCIMER LASER.

AU - Craighead, Harold G.

AU - White, J. C.

AU - Horward, R. E.

AU - Jackel, L. D.

PY - 1983/12/1

Y1 - 1983/12/1

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M3 - Conference contribution

AN - SCOPUS:0020895844

BT - Unknown Host Publication Title

PB - Institute of Electrical and Electronics Engineers Inc.

CY - New York, NY, USA

ER -