High resolution electron beam nanofabrication

Research output: Contribution to conference › Paper › peer-review

Original language	English (US)
DOIs	https://doi.org/10.1109/EDMS.1994.771099
State	Published - 1994
Event	1994 International Electron Devices and Materials Symposium, EDMS 1994 - Hsinchu, Taiwan, Province of China Duration: Jul 12 1994 → Jul 15 1994

Other	1994 International Electron Devices and Materials Symposium, EDMS 1994
Country/Territory	Taiwan, Province of China
City	Hsinchu
Period	7/12/94 → 7/15/94

ASJC Scopus subject areas

TY - CONF

T1 - High resolution electron beam nanofabrication

AU - Craighead, H. G.

PY - 1994

Y1 - 1994

UR - http://www.scopus.com/inward/record.url?scp=85063592598&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85063592598&partnerID=8YFLogxK

U2 - 10.1109/EDMS.1994.771099

DO - 10.1109/EDMS.1994.771099

M3 - Paper

AN - SCOPUS:85063592598

T2 - 1994 International Electron Devices and Materials Symposium, EDMS 1994

Y2 - 12 July 1994 through 15 July 1994

ER -