Silicon-micromachined direct-pore filters for ultrafiltration

Wen Hwa Chu; Tony Huen; Jay K. Tu; Mauro Ferrari

doi:10.1117/12.269961

Silicon-micromachined direct-pore filters for ultrafiltration

Wen Hwa Chu, Tony Huen, Jay K. Tu, Mauro Ferrari

Houston Methodist Hospital

Research output: Contribution to journal › Conference article › peer-review

27 Scopus citations

Abstract

A new silicon filter with straight filtration channels has been fabricated and characterized. The semi-permeable membrane of the filter is made of a sandwiched p⁺ polysilicon/oxide/p⁺ silicon structure. The sacrificial oxide between the two silicon layers determines the pore size of the filter. This filter can be mass produced and has very precise control over filtration channels (variation less than 25%). Two log reduction of 100 nm fluorescent particles has been achieved in our 50 nm filters. The tested filtration fluxes for filtered DI water, 0.1 M PBS and ethanol solution (75% wt) were 0.54 - 1.5, 0.10, 0.54 - 1.2 ml/cm²hr, respectively.

Original language	English (US)
Pages (from-to)	111-122
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	2978
DOIs	https://doi.org/10.1117/12.269961
State	Published - 1997
Event	Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications - San Jose, CA, United States Duration: Feb 10 1997 → Feb 10 1997

Keywords

Filtration
Immuno-isolation
Microelectro-mechanical-system
Micromachining
Semi-permeable membrane
Silicon filter
Ultrafiltration

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.269961

Cite this

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title = "Silicon-micromachined direct-pore filters for ultrafiltration",

abstract = "A new silicon filter with straight filtration channels has been fabricated and characterized. The semi-permeable membrane of the filter is made of a sandwiched p+ polysilicon/oxide/p+ silicon structure. The sacrificial oxide between the two silicon layers determines the pore size of the filter. This filter can be mass produced and has very precise control over filtration channels (variation less than 25%). Two log reduction of 100 nm fluorescent particles has been achieved in our 50 nm filters. The tested filtration fluxes for filtered DI water, 0.1 M PBS and ethanol solution (75% wt) were 0.54 - 1.5, 0.10, 0.54 - 1.2 ml/cm2hr, respectively.",

keywords = "Filtration, Immuno-isolation, Microelectro-mechanical-system, Micromachining, Semi-permeable membrane, Silicon filter, Ultrafiltration",

author = "Chu, {Wen Hwa} and Tony Huen and Tu, {Jay K.} and Mauro Ferrari",

year = "1997",

doi = "10.1117/12.269961",

language = "English (US)",

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pages = "111--122",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications ; Conference date: 10-02-1997 Through 10-02-1997",

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T1 - Silicon-micromachined direct-pore filters for ultrafiltration

AU - Chu, Wen Hwa

AU - Huen, Tony

AU - Tu, Jay K.

AU - Ferrari, Mauro

PY - 1997

Y1 - 1997

N2 - A new silicon filter with straight filtration channels has been fabricated and characterized. The semi-permeable membrane of the filter is made of a sandwiched p+ polysilicon/oxide/p+ silicon structure. The sacrificial oxide between the two silicon layers determines the pore size of the filter. This filter can be mass produced and has very precise control over filtration channels (variation less than 25%). Two log reduction of 100 nm fluorescent particles has been achieved in our 50 nm filters. The tested filtration fluxes for filtered DI water, 0.1 M PBS and ethanol solution (75% wt) were 0.54 - 1.5, 0.10, 0.54 - 1.2 ml/cm2hr, respectively.

AB - A new silicon filter with straight filtration channels has been fabricated and characterized. The semi-permeable membrane of the filter is made of a sandwiched p+ polysilicon/oxide/p+ silicon structure. The sacrificial oxide between the two silicon layers determines the pore size of the filter. This filter can be mass produced and has very precise control over filtration channels (variation less than 25%). Two log reduction of 100 nm fluorescent particles has been achieved in our 50 nm filters. The tested filtration fluxes for filtered DI water, 0.1 M PBS and ethanol solution (75% wt) were 0.54 - 1.5, 0.10, 0.54 - 1.2 ml/cm2hr, respectively.

KW - Filtration

KW - Immuno-isolation

KW - Microelectro-mechanical-system

KW - Micromachining

KW - Semi-permeable membrane

KW - Silicon filter

KW - Ultrafiltration

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DO - 10.1117/12.269961

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VL - 2978

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EP - 122

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

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Y2 - 10 February 1997 through 10 February 1997

ER -

Silicon-micromachined direct-pore filters for ultrafiltration

Abstract

Keywords

ASJC Scopus subject areas

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